@misc{indiciae0ecf422af169,
  title = {Compositon of Tantalum Nitride Thin Films Grown by Low-Energy Nitrogen Implantation: A Factor Analysis Study of the Ta 4f XPS Core Level},
  author = {A. Arranz and C. Palacio},
  year = {2004},
  doi = {10.1007/s00339-004-3182-0},
  url = {https://arxiv.org/abs/cond-mat/0409712},
  note = {Source identifier: cond-mat/0409712}
}