TY  - RPRT
TI  - Compositon of Tantalum Nitride Thin Films Grown by Low-Energy Nitrogen Implantation: A Factor Analysis Study of the Ta 4f XPS Core Level
AU  - A. Arranz
AU  - C. Palacio
PY  - 2004
DO  - 10.1007/s00339-004-3182-0
UR  - https://arxiv.org/abs/cond-mat/0409712
ID  - cond-mat/0409712
ER  -