@misc{indiciaeb192ffbabca4,
  title = {Synthesis of ammonium silicon fluoride cryptocrystals on silicon by dry etching},
  author = {Seref Kalem},
  year = {2004},
  doi = {10.1016/j.apsusc.2004.05.008},
  url = {https://arxiv.org/abs/cond-mat/0410606},
  note = {Source identifier: cond-mat/0410606}
}