TY  - RPRT
TI  - Synthesis of ammonium silicon fluoride cryptocrystals on silicon by dry etching
AU  - Seref Kalem
PY  - 2004
DO  - 10.1016/j.apsusc.2004.05.008
UR  - https://arxiv.org/abs/cond-mat/0410606
ID  - cond-mat/0410606
ER  -