@misc{indiciae3c62dfc4a046,
  title = {Multiple layer local oxidation for fabricating semiconductor nanostructures},
  author = {M. Sigrist and A. Fuhrer and T. Ihn and K. Ensslin and D. C. Driscoll and A. C. Gossard},
  year = {2004},
  doi = {10.1063/1.1809273},
  url = {https://arxiv.org/abs/cond-mat/0411129},
  note = {Source identifier: cond-mat/0411129}
}