@misc{indiciaecf08b528a2a9,
  title = {Vacancy assisted arsenic diffusion and time dependent clustering effects in silicon},
  author = {Benjamin P. Haley and Niels Grønbech-Jensen},
  year = {2004},
  doi = {10.1103/physrevb.71.195203},
  url = {https://arxiv.org/abs/cond-mat/0412501},
  note = {Source identifier: cond-mat/0412501}
}