TY  - RPRT
TI  - Vacancy assisted arsenic diffusion and time dependent clustering effects in silicon
AU  - Benjamin P. Haley
AU  - Niels Grønbech-Jensen
PY  - 2004
DO  - 10.1103/physrevb.71.195203
UR  - https://arxiv.org/abs/cond-mat/0412501
ID  - cond-mat/0412501
ER  -