@misc{indiciae5da8ecb8bff7,
  title = {A new apparatus for deep patterning of beam sensitive targets by means of high-energy ion beam},
  author = {A. Rovelli and A. Amato and D. Botta and A. Chiodoni and R. Gerbaldo and G. Ghigo and L. Gozzelino and F. Laviano and B. Minetti and E. Mezzetti},
  year = {2005},
  doi = {10.1016/j.nimb.2005.06.208},
  url = {https://arxiv.org/abs/cond-mat/0503039},
  note = {Source identifier: cond-mat/0503039}
}