@misc{indiciae522a4095c265,
  title = {Raman Measurements and Stress Analysis in Gallium Ion Implanted Gallium Nitride Epitaxial Layers on Sapphire},
  author = {S. Mal and A. Singha and S. Dhara and A. Roy},
  year = {2006},
  doi = {10.1016/j.tsf.2006.07.018},
  url = {https://arxiv.org/abs/cond-mat/0505335},
  note = {Source identifier: cond-mat/0505335}
}