@misc{indiciae2bbbaa8c7436,
  title = {Electrical activation and electron spin coherence of ultra low dose antimony implants in silicon},
  author = {T. Schenkel and A. M. Tyryshkin and R. de Sousa and K. B. Whaley and J. Bokor and J. A. Liddle and A. Persaud and J. Shangkuan and I. Chakarov and S. A. Lyon},
  year = {2005},
  doi = {10.1063/1.2182068},
  url = {https://arxiv.org/abs/cond-mat/0507318},
  note = {Source identifier: cond-mat/0507318}
}