@misc{indiciaeb4149b57a415,
  title = {Concept of deterministic single ion doping with sub-nm spatial resolution},
  author = {J. Meijer and T. Vogel and B. Burchard and I. Rangelow and L. Bischoff and J. Wrachtrup and M. Domhan and F. Jelezko and W. Schnitzler and S. A. Schulz and K. Singer and F. Schmidt-Kaler},
  year = {2006},
  doi = {10.1007/s00339-006-3497-0},
  url = {https://arxiv.org/abs/cond-mat/0508756},
  note = {Source identifier: cond-mat/0508756}
}