TY - RPRT TI - Composition, structure, and luminescent properties of SiOxNy(Si) composite layers containing Si nanocrystals AU - V. G. Baru AU - I. N. Dyuzhikov AU - V. I. Pokalyakin AU - O. F. Shevchenko AU - E. A. Skryleva AU - O. M. Zhigalina PY - 2005 UR - https://arxiv.org/abs/cond-mat/0511602 ID - cond-mat/0511602 ER -