@misc{indiciae5bda2d2856cd,
  title = {Dielectric Properties of Noncrystalline HfSiON},
  author = {Masahiro Koike and Tsunehiro Ino and Yuuichi Kamimuta and Masato Koyama and Yoshiki Kamata and Masamichi Suzuki and Yuichiro Mitani and Akira Nishiyama},
  year = {2006},
  doi = {10.1103/physrevb.73.125123},
  url = {https://arxiv.org/abs/cond-mat/0601503},
  note = {Source identifier: cond-mat/0601503}
}