@misc{indiciae14f02864b69d,
  title = {Characterization of a fabrication process for the integration of superconducting qubits and RSFQ circuits},
  author = {Maria Gabriella Castellano and Leif Gronberg and Pasquale Carelli and Fabio Chiarello and Carlo Cosmelli and Roberto Leoni and Stefano Poletto and Guido Torrioli and Juha Hassel and Panu Helisto},
  year = {2006},
  doi = {10.1088/0953-2048/19/8/030},
  url = {https://arxiv.org/abs/cond-mat/0604547},
  note = {Source identifier: cond-mat/0604547}
}