@misc{indiciae1ece602827ba,
  title = {Impurity conduction in phosphorus-doped buried-channel silicon-on-insulator field-effect transistors},
  author = {Yukinori Ono and Jean-Francois Morizur and Katsuhiko Nishiguchi and Kei Takashina and Hiroshi Yamaguchi and Kazuma Hiratsuka and Seiji Horiguchi and Hiroshi Inokawa and Yasuo Takahashi},
  year = {2006},
  doi = {10.1103/physrevb.74.235317},
  url = {https://arxiv.org/abs/cond-mat/0607806},
  note = {Source identifier: cond-mat/0607806}
}