TY  - RPRT
TI  - Self-organized pore formation and open-loop-control in semiconductor etching
AU  - Jens Christian Claussen
AU  - Jürgen Carstensen
AU  - Marc Christophersen
AU  - Sergiu Langa
AU  - Helmut Föll
PY  - 2006
DO  - 10.1063/1.1497835
UR  - https://arxiv.org/abs/cond-mat/0608513
ID  - cond-mat/0608513
ER  -