@misc{indiciaeb34932c76dd4, title = {Novel Fabrication of Micromechanical Oscillators with Nanoscale Sensitivity at Room Temperature}, author = {Michelle D. Chabot and John M. Moreland and Lan Gao and Sy-Hwang Liou and Casey W. Miller}, year = {2006}, url = {https://arxiv.org/abs/cond-mat/0608617}, note = {Source identifier: cond-mat/0608617} }