TY  - RPRT
TI  - Novel Fabrication of Micromechanical Oscillators with Nanoscale Sensitivity at Room Temperature
AU  - Michelle D. Chabot
AU  - John M. Moreland
AU  - Lan Gao
AU  - Sy-Hwang Liou
AU  - Casey W. Miller
PY  - 2006
UR  - https://arxiv.org/abs/cond-mat/0608617
ID  - cond-mat/0608617
ER  -