@misc{indiciae07452bfb119b,
  title = {Resolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition},
  author = {Ivo Utke and Vinzenz Friedli and Martin Purrucker and Johann Michler},
  year = {2007},
  doi = {10.1116/1.2789441},
  url = {https://arxiv.org/abs/cond-mat/0703539},
  note = {Source identifier: cond-mat/0703539}
}