TY  - RPRT
TI  - Resolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition
AU  - Ivo Utke
AU  - Vinzenz Friedli
AU  - Martin Purrucker
AU  - Johann Michler
PY  - 2007
DO  - 10.1116/1.2789441
UR  - https://arxiv.org/abs/cond-mat/0703539
ID  - cond-mat/0703539
ER  -