@misc{indiciaea3d03a6f546e,
  title = {Diffusion and activation of n-type dopants in germanium},
  author = {Masahiro Koike and Yoshiki Kamata and Tsunehiro Ino and Daisuke Hagishima and Kosuke Tatsumura and Masato Koyama and Akira Nishiyama},
  year = {2008},
  doi = {10.1063/1.2958326},
  url = {https://arxiv.org/abs/cond-mat/0703708},
  note = {Source identifier: cond-mat/0703708}
}