TY - RPRT TI - High performance hard magnetic NdFeB thick films for integration into Micro-Electro-Mechanical-Systems AU - N. M. Dempsey AU - Arnaud Walther AU - Frederic May AU - Dominique Givord AU - Kirill Khlopkov AU - Oliver Gutfleisch PY - 2007 DO - 10.1063/1.2710771 UR - https://arxiv.org/abs/cond-mat/0703785 ID - cond-mat/0703785 ER -