@misc{indiciae4649077e0df6,
  title = {Multilayer technique developed for fabricating Nb-based single-electron devices},
  author = {Alexey B. Pavolotsky and Thomas Weimann and Hansjoerg Scherer and Vladimir A. Krupenin and Juergen Niemeyer and Alexander B. Zorin},
  year = {1998},
  doi = {10.1116/1.590504},
  url = {https://arxiv.org/abs/cond-mat/9804192},
  note = {Source identifier: cond-mat/9804192}
}