TY  - RPRT
TI  - Multilayer technique developed for fabricating Nb-based single-electron devices
AU  - Alexey B. Pavolotsky
AU  - Thomas Weimann
AU  - Hansjoerg Scherer
AU  - Vladimir A. Krupenin
AU  - Juergen Niemeyer
AU  - Alexander B. Zorin
PY  - 1998
DO  - 10.1116/1.590504
UR  - https://arxiv.org/abs/cond-mat/9804192
ID  - cond-mat/9804192
ER  -