@misc{indiciaec6910a88183b,
  title = {Nanolithography by non-contact AFM induced local oxidation : Fabrication of tunneling barriers suitable for single electron devices},
  author = {B. Irmer and M. Kehrle and H. Lorenz and J. P. Kotthaus},
  year = {1998},
  url = {https://arxiv.org/abs/cond-mat/9805350},
  note = {Source identifier: cond-mat/9805350}
}