TY  - RPRT
TI  - Nanolithography by non-contact AFM induced local oxidation : Fabrication of tunneling barriers suitable for single electron devices
AU  - B. Irmer
AU  - M. Kehrle
AU  - H. Lorenz
AU  - J. P. Kotthaus
PY  - 1998
UR  - https://arxiv.org/abs/cond-mat/9805350
ID  - cond-mat/9805350
ER  -