@misc{indiciae5699f3f10a16,
  title = {Coupling of Length Scales and Atomistic Simulation of MEMS Resonators},
  author = {Robert E. Rudd and Jeremy Q. Broughton},
  year = {1998},
  doi = {10.1117/12.341254},
  url = {https://arxiv.org/abs/cond-mat/9812232},
  note = {Source identifier: cond-mat/9812232}
}