TY  - RPRT
TI  - Coupling of Length Scales and Atomistic Simulation of MEMS Resonators
AU  - Robert E. Rudd
AU  - Jeremy Q. Broughton
PY  - 1998
DO  - 10.1117/12.341254
UR  - https://arxiv.org/abs/cond-mat/9812232
ID  - cond-mat/9812232
ER  -