@misc{indiciae61ae4e98e925,
  title = {An Efficient Molecular Dynamics Scheme for Predicting Dopant Implant Profiles in Semiconductors},
  author = {Keith M. Beardmore and Niels Gronbech-Jensen},
  year = {1999},
  doi = {10.1016/s0168-583x(99)00203-7},
  url = {https://arxiv.org/abs/cond-mat/9901338},
  note = {Source identifier: cond-mat/9901338}
}