TY  - RPRT
TI  - An Efficient Molecular Dynamics Scheme for Predicting Dopant Implant Profiles in Semiconductors
AU  - Keith M. Beardmore
AU  - Niels Gronbech-Jensen
PY  - 1999
DO  - 10.1016/s0168-583x(99)00203-7
UR  - https://arxiv.org/abs/cond-mat/9901338
ID  - cond-mat/9901338
ER  -