@misc{indiciaeb80799c977fa,
  title = {Application of Ultraviolet Fluorescence in Wafer Surface Cleaning Analysis},
  author = {Zhongwei Pan and Richard Chin},
  year = {1999},
  url = {https://arxiv.org/abs/cond-mat/9905196},
  note = {Source identifier: cond-mat/9905196}
}