TY  - RPRT
TI  - A thermostable trilayer resist for niobium lift-off
AU  - P. Dubos
AU  - P. Charlat
AU  - Th. Crozes
AU  - P. Paniez
AU  - B. Pannetier
PY  - 1999
DO  - 10.1116/1.591162
UR  - https://arxiv.org/abs/cond-mat/9909053
ID  - cond-mat/9909053
ER  -