@misc{indiciae18c8ce9af493,
  title = {Thermoelastic Damping in Micro- and Nano-Mechanical Systems},
  author = {Ron Lifshitz and M. L. Roukes},
  year = {1999},
  doi = {10.1103/physrevb.61.5600},
  url = {https://arxiv.org/abs/cond-mat/9909271},
  note = {Source identifier: cond-mat/9909271}
}