TY  - RPRT
TI  - Thermoelastic Damping in Micro- and Nano-Mechanical Systems
AU  - Ron Lifshitz
AU  - M. L. Roukes
PY  - 1999
DO  - 10.1103/physrevb.61.5600
UR  - https://arxiv.org/abs/cond-mat/9909271
ID  - cond-mat/9909271
ER  -