@misc{indiciae9fc43454ce8b,
  title = {Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films},
  author = {George Yong Liu and Ray F. Zhang and Kelvin Hsu and Lawrence Camilletti},
  year = {2000},
  url = {https://arxiv.org/abs/cs/0011014},
  note = {Source identifier: cs/0011014}
}