TY  - RPRT
TI  - Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films
AU  - George Yong Liu
AU  - Ray F. Zhang
AU  - Kelvin Hsu
AU  - Lawrence Camilletti
PY  - 2000
UR  - https://arxiv.org/abs/cs/0011014
ID  - cs/0011014
ER  -