TY  - RPRT
TI  - Anomalous Capacitive Sheath with Deep Radio Frequency Electric Field Penetration
AU  - Igor D. Kaganovich
PY  - 2002
DO  - 10.1103/physrevlett.89.265006
UR  - https://arxiv.org/abs/physics/0203042
ID  - physics/0203042
ER  -