TY  - RPRT
TI  - Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors
AU  - A. Rousseau
AU  - E. Teboul
AU  - N. Lang
AU  - M. Hannemann
AU  - J. Röpcke
PY  - 2002
DO  - 10.1063/1.1497454
UR  - https://arxiv.org/abs/physics/0206032
ID  - physics/0206032
ER  -