@misc{indiciaedd07d5f58be1, title = {Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges}, author = {Badri Ramamurthi and Demetre J. Economou and Igor D. Kaganovich}, year = {2002}, doi = {10.1088/0963-0252/12/2/308}, url = {https://arxiv.org/abs/physics/0208053}, note = {Source identifier: physics/0208053} }