TY  - RPRT
TI  - Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges
AU  - Badri Ramamurthi
AU  - Demetre J. Economou
AU  - Igor D. Kaganovich
PY  - 2002
DO  - 10.1088/0963-0252/12/2/308
UR  - https://arxiv.org/abs/physics/0208053
ID  - physics/0208053
ER  -