@misc{indiciae92ae81c33a94,
  title = {Effect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures},
  author = {Badri Ramamurthi and Demetre J. Economou and Igor D. Kaganovich},
  year = {2002},
  doi = {10.1088/0963-0252/12/3/302},
  url = {https://arxiv.org/abs/physics/0210114},
  note = {Source identifier: physics/0210114}
}