TY  - RPRT
TI  - Effect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures
AU  - Badri Ramamurthi
AU  - Demetre J. Economou
AU  - Igor D. Kaganovich
PY  - 2002
DO  - 10.1088/0963-0252/12/3/302
UR  - https://arxiv.org/abs/physics/0210114
ID  - physics/0210114
ER  -