@misc{indiciae5fb12a7db44a, title = {Statistical Yield Modeling for IC Manufacture: Hierarchical Fault Distributions}, author = {Yu. I. Bogdanov and N. A. Bogdanova and V. L. Dshkhunyan}, year = {2003}, url = {https://arxiv.org/abs/physics/0303039}, note = {Source identifier: physics/0303039} }