@misc{indiciae08f8b7f3b006,
  title = {Microfabrication of Laser-Driven Accelerator Structures},
  author = {Benjamin Cowan},
  year = {2003},
  doi = {10.1063/1.1524887},
  url = {https://arxiv.org/abs/physics/0304097},
  note = {Source identifier: physics/0304097}
}