TY - RPRT TI - New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure AU - I. V. Schweigert AU - V. A. Schweigert PY - 2003 DO - 10.1088/0963-0252/13/2/018 UR - https://arxiv.org/abs/physics/0308071 ID - physics/0308071 ER -