@misc{indiciae9c9d13e1a7dd,
  title = {Nanolithography with metastable helium atoms in a high-power standing-wave light field},
  author = {S. J. H. Petra and L. Feenstra and W. Hogervorst and W. Vassen},
  year = {2003},
  doi = {10.1007/s00340-003-1371-8},
  url = {https://arxiv.org/abs/physics/0308076},
  note = {Source identifier: physics/0308076}
}