TY  - RPRT
TI  - Nanolithography with metastable helium atoms in a high-power standing-wave light field
AU  - S. J. H. Petra
AU  - L. Feenstra
AU  - W. Hogervorst
AU  - W. Vassen
PY  - 2003
DO  - 10.1007/s00340-003-1371-8
UR  - https://arxiv.org/abs/physics/0308076
ID  - physics/0308076
ER  -