@misc{indiciaed52836eb2c83,
  title = {Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems},
  author = {K. L. Ekinci and Y. T. Yang and M. L. Roukes},
  year = {2003},
  doi = {10.1063/1.1642738},
  url = {https://arxiv.org/abs/physics/0309075},
  note = {Source identifier: physics/0309075}
}