TY  - RPRT
TI  - Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
AU  - K. L. Ekinci
AU  - Y. T. Yang
AU  - M. L. Roukes
PY  - 2003
DO  - 10.1063/1.1642738
UR  - https://arxiv.org/abs/physics/0309075
ID  - physics/0309075
ER  -