@misc{indiciaea1521556a7fa,
  title = {Multilevel Clustering Fault Model for IC Manufacture},
  author = {Yu. I. Bogdanov and N. A. Bogdanova and A. V. Rudnev},
  year = {2003},
  doi = {10.1117/12.562667},
  url = {https://arxiv.org/abs/physics/0310012},
  note = {Source identifier: physics/0310012}
}